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| PROJEKTE | |
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OPTOBASIS Manufacturing Technology and Reproducability
of Vertical Microsystem Assembly using LTCC Technology |
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| Emphasis of the project is the realisation of a completely new generation of ceramic microsystem devices for optoelectronic and telecommunication applications. Improved miniaturisation of the package and increasement of the functionality have been main targets | They were achieved by developing a new multilayer ceramic material system and developing thin film and thickfilm proccesses for this new material system. | |||
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Lead time: 01.09.1999 – 30.11.2001 Partner: SIEGERT TFT, CIS, Corning (Telequarz) , Programme: Microsystem Technology 1994-1999 << zurück |
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